DICING EQUIPMENT

Japanese Patent JPS62123737

A

PURPOSE: To effectively prevent the charge of a high-pressure water flow by using pure water itself for cooling a blade and required concentration carbonic acid water for washing.

CONSTITUTION: Pure water is supplied from the same water tank 19 to both the nozzle 12 for cooling a blade 11 and the high-pressure injection nozzle 13 for washing. The pure water is directly supplied to the nozzle 12 for cooling from the water tank 19. On the other hand, the pure water from the water tank 19 is introduced in a mixing tank 20 where carbon dioxide is introduced from a cylinder 21 and is mixed with the pure water and required concentration carbonic acid water is made for the high-pressure injection nozzle. By pressurizing the carbonic acid water with a pump 22, a so called high-pressure jet water flow can be injected on a wafer 16 from the nozzle 13. In this way, charging due to the friction of the washing water with the nozzle or with air, etc. can sufficiently be prevented.

MIMATA TSUTOMU
KAWANOBE TORU
MINATO AKIRA

JP26245585A

June 05, 1987

November 25, 1985

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HITACHI LTD
HITACHI TOKYO ELECTRONICS

B24B55/02; B28D5/00; H01L21/301; H01L21/304; H01L21/78; (IPC1-7): B24B55/02; B28D5/00; H01L21/304; H01L21/78

Katsuo Ogawa

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