Title:
ダイシング方法
Document Type and Number:
Japanese Patent JP5182653
Kind Code:
B2
Abstract:
According to an aspect of the present invention, there is provided a dicing apparatus in which: in a case where a control device detects, during an image pickup of a workpiece set onto a second worktable by a first image pickup device and a second image pickup device, that an image of a workpiece set onto a first worktable also needs to be picked up by the first image pickup device and the second image pickup device, the control device determines a priority between an operation performed on the first worktable and an operation performed on the second worktable; and when it is determined that the operation performed on the first worktable has a higher priority, the image pickup of the workpiece set onto the second worktable is interrupted, and the first image pickup device and the second image pickup device are moved to perform an image pickup of the workpiece on the first worktable.
Inventors:
Takeo Sakuma
Application Number:
JP2009542531A
Publication Date:
April 17, 2013
Filing Date:
November 13, 2008
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/301; B24B51/00
Domestic Patent References:
| JP2007105861A | 2007-04-26 | |||
| JP2005085975A | 2005-03-31 | |||
| JP2004288792A | 2004-10-14 |
Attorney, Agent or Firm:
Kenzo Matsuura