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Patent Searching and Data


Title:
DICING METHOD
Document Type and Number:
Japanese Patent JPS6172502
Kind Code:
A
Inventors:
TAKINO TETSUJI
ASAOKA MASATOSHI
KAKEHI MINORU
MIZUSHIMA HAYAO
Application Number:
JP19405284A
Publication Date:
April 14, 1986
Filing Date:
September 18, 1984
Export Citation:
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Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L21/301; B28B5/00; H01L21/78; (IPC1-7): B28B5/00; H01L21/78
Attorney, Agent or Firm:
Shinnosuke Tsunoda



 
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