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Title:
DIELECTRIC CAPACITOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2002353414
Kind Code:
A
Abstract:

To provide a dielectric capacitor which exhibits proper electrical characteristics by preventing the advancing diffusion of an external substance, such as a reducing element or the like to a dielectric film, and to provide a method for manufacturing the same.

According to a ferroelectric capacitor C103, the advancing diffusion of a hydrogen generated, when an oxide film 7 and an oxide film 9 are formed to a ferroelectric film 7 is prevented by a first hydrogen diffusion preventing film 101. Further, since the sidewall of a ferroelectric film 4 is covered with a second hydrogen diffusion preventing film 102, advancing of the hydrogen from this sidewall to the film 4 is completely prevented. Accordingly, electrical characteristics of the film 4 is held proper. Since the film 102 does not exist on the upper surface of the film 7, the height of the capacitor C103 is suppressed to a necessary minimum limit. This acts advantageously, with respect to planarization of the entire semiconductor device formed with the capacitor C103.


Inventors:
MIHASHI TOSHIRO
Application Number:
JP2001152714A
Publication Date:
December 06, 2002
Filing Date:
May 22, 2001
Export Citation:
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Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L27/105; H01L21/02; H01L21/8246; (IPC1-7): H01L27/105
Domestic Patent References:
JP2002314047A2002-10-25
JP2001210798A2001-08-03
JP2003510839A2003-03-18
JPH1154718A1999-02-26
JP2000133633A2000-05-12
JP2001036026A2001-02-09
JP2003258201A2003-09-12
Foreign References:
WO1997035341A11997-09-25
WO2001024237A12001-04-05
Attorney, Agent or Firm:
Kamei Miaki (3 others)