Title:
誘電体キャパシタおよびその製造方法ならびに半導体装置
Document Type and Number:
Japanese Patent JP4539844
Kind Code:
B2
Abstract:
A metal thin film provided on a substrate and having a metal with a face-centered cubic crystal structure, wherein the metal thin film is preferentially oriented in a (111) plane, and a (100) plane which is not parallel to a surface of the substrate is present on a surface of the thin film. In this metal thin film, the metal with a face-centered cubic crystal structure includes at least one element selected from the group consisting of Pt, Ir, and Ru.
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Inventors:
Tatsuo Sawasaki
Kenichi Kurokawa
Teruo Tagawa
Kenichi Tsuchiya
Kenichi Kurokawa
Teruo Tagawa
Kenichi Tsuchiya
Application Number:
JP2005048820A
Publication Date:
September 08, 2010
Filing Date:
February 24, 2005
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L21/28; H01L21/8246; H01B5/14; H01B13/00; H01L21/02; H01L21/20; H01L21/285; H01L21/3205; H01L21/82; H01L27/10; H01L27/105; H01L27/108; H01L27/115; H01L29/92
Domestic Patent References:
| JP7169648A | ||||
| JP2001085624A | ||||
| JP2001164382A | ||||
| JP2002359287A | ||||
| JP2001126947A | ||||
| JP2000299248A |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi