Title:
DIELECTRIC CELL AND OZONIZER USING THE SAME CELL
Document Type and Number:
Japanese Patent JPH0624707
Kind Code:
A
Abstract:
PURPOSE: To stably feed an ozone gas having a high clean level by retaining space dimensions between a pair of dielectric substances forming a discharge space to a definite value and preventing penetration of impurity gas into the discharge space from an adhesive, etc.
CONSTITUTION: The objective cell is composed of two sheets of quartz glasses 11 and 12, and a groove part constituting a flow pass of a raw material gas in at least either one quartz glass 11 is engraved and the face in which this groove part is engraved is integrally joined to the other face of the quartz glass 12 by optical adhesion and the flow pass 13 of a raw material gas is formed on the joining face.
Inventors:
NAGASAKA MICHIO
MATSUZAWA MINORU
MABE MAKOTO
ISHIHARA MASAKI
MATSUZAWA MINORU
MABE MAKOTO
ISHIHARA MASAKI
Application Number:
JP18096192A
Publication Date:
February 01, 1994
Filing Date:
July 08, 1992
Export Citation:
Assignee:
YAMANASHI HIGHTECH KK
International Classes:
C01B13/11; H01T23/00; (IPC1-7): C01B13/11; H01T23/00
Attorney, Agent or Firm:
Asakawa Satoshi