Title:
DIELECTRIC STRUCTURE AND METHOD OF MANUFACTURING SAME
Document Type and Number:
Japanese Patent JPS55113207
Kind Code:
A
Inventors:
IWAMATSU SEIICHI
Application Number:
JP1976679A
Publication Date:
September 01, 1980
Filing Date:
February 23, 1979
Export Citation:
Assignee:
CHO LSI GIJUTSU KENKYU KUMIAI
International Classes:
C30B29/20; H01B3/00; H01L21/86; (IPC1-7): C30B29/20; H01B3/00; H01L21/86
Domestic Patent References:
| JPS51146176A | 1976-12-15 | |||
| JPS4918430A | 1974-02-18 | |||
| JPS4923621A | 1974-03-02 |