Title:
誘電体、キャパシタ、電気回路、回路基板、及び機器
Document Type and Number:
Japanese Patent JP7122617
Kind Code:
B1
Abstract:
本開示の誘電体１０は、フッ素及び酸素を含有するアモルファスのタンタル化合物を含んでおり、高い比誘電率の観点から有利である。
Inventors:
Naonori Masuko
Hideaki Adachi
Rio Suzuka
Taketo Goto
Ryosuke Kikuchi
Kano study
Hideaki Adachi
Rio Suzuka
Taketo Goto
Ryosuke Kikuchi
Kano study
Application Number:
JP2022532863A
Publication Date:
August 22, 2022
Filing Date:
February 15, 2022
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H01G4/10; H01G9/07; H01G9/15
Domestic Patent References:
| JP2010245220A | 2010-10-28 |
Other References:
LEILEI, XU, ほか５名: ""Complex-Mediated Synthesis of Tantalum Oxyfluoride Hierarchical Nanostructures for Highly Efficient", ACS APPLIED MATERIALS & INTERFACES, vol. Volume 8, Issue 14, JPN6022028715, 24 March 2016 (2016-03-24), pages 9395 - 9404, ISSN: 0004824606
SAWHILL, STEPHANIE, ほか１名: ""A near zero coefficient of thermal expantion ceramic: Tantalum oxyfluoride"", CERAMICS INTERNATIONAL, vol. Volume 38, Issue 3, JPN6022028716, 30 April 2012 (2012-04-30), pages 1981 - 1989, ISSN: 0004824607
小寺 正徳: ""ReO3構造を有する酸フッ化物誘電体薄膜の開発"", ANNUAL REPORT OF THE MURATA SCIENCE FOUNDATION, JPN6022028717, 31 December 2020 (2020-12-31), pages 261 - 263, ISSN: 0004824608
SAWHILL, STEPHANIE, ほか１名: ""A near zero coefficient of thermal expantion ceramic: Tantalum oxyfluoride"", CERAMICS INTERNATIONAL, vol. Volume 38, Issue 3, JPN6022028716, 30 April 2012 (2012-04-30), pages 1981 - 1989, ISSN: 0004824607
小寺 正徳: ""ReO3構造を有する酸フッ化物誘電体薄膜の開発"", ANNUAL REPORT OF THE MURATA SCIENCE FOUNDATION, JPN6022028717, 31 December 2020 (2020-12-31), pages 261 - 263, ISSN: 0004824608
Attorney, Agent or Firm:
Koichi Kamata
Mitsuhiko Nishio
Mitsuhiko Nishio