Title:
DIFFERENTIAL PRESSURE/PRESSURE DETECTOR
Document Type and Number:
Japanese Patent JP2007064703
Kind Code:
A
Abstract:
To provide a differential pressure/pressure detector with increased joint strength.
The remote seal type differential pressure/pressure detector 1 comprises pressure receiving elements 100L, 100R, capillary tubes 200L, 200R, and a detector 300. The pressure receiving elements 100L, 100R are formed by welding tantalum pressure receiving element side rings 104L, 104R to stainless pressure receiving element bodies 101L, 101R, welding zirconium diaphragm side rings 103L, 103R thereon, and welding sealing diaphragms 102L, 102R, respectively.
Inventors:
TAKANO TOSHIYUKI
NAKAMURA KIMIHIRO
NAKAMURA KIMIHIRO
Application Number:
JP2005248623A
Publication Date:
March 15, 2007
Filing Date:
August 30, 2005
Export Citation:
Assignee:
FUJI ELECTRIC SYSTEMS CO LTD
International Classes:
G01L13/00; G01L13/02; G01L19/04
Attorney, Agent or Firm:
Yuichi Morita
Previous Patent: SEMICONDUCTOR WAFER IMPURITY ANALYSIS METHOD
Next Patent: COMBINATION BALANCE AND COMBINATION WEIGHING METHOD
Next Patent: COMBINATION BALANCE AND COMBINATION WEIGHING METHOD