Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DIFFERENTIAL PLANE-MIRROR INTERFEROMETER SYSTEM
Document Type and Number:
Japanese Patent JPS62233704
Kind Code:
A
Abstract:
A source (10) provides an input beam (12) having two stabilised orthogonally-polarised optical frequencies of a frequency difference determined by an electrical reference signal (11). The beamsplitter-beamfolder assembly (16A) has a right angle prism (25) and rhomboid prism (22) which separate the incident beam by spatial separation of the two frequency components to form two parallel beams (30,31) polarised orthogonally. A half-wave retarder plate (29A) rotates the second (31) of the two parallel beams so that it has the same polarisation as the first. A polarising beam splitter (40) acts with a retroreflector (45) to couple to the beams which are reflected twice by the plane mirrors (70,71) to form two parallel output beams (60,63) of the same polarisation. These are converted into two separate orthogonally polarised parallel output beams (62,63) by a half wave retarder (29). The beam splitter-beamfolder assembly converts the two parallel output beams to a single beam (80).

Inventors:
PIITA ESU YANGU
GEARI II SAMAGUREEN
Application Number:
JP7016187A
Publication Date:
October 14, 1987
Filing Date:
March 23, 1987
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ZYGO CORP
International Classes:
G01B11/14; G01B9/02; G01J9/04; (IPC1-7): G01B9/02; G01B11/14
Attorney, Agent or Firm:
Shintaro Nogawa



 
Previous Patent: JP62233703

Next Patent: POSITION DETECTING METHOD