To provide a differential pressure/absolute pressure converter for accurately and rapidly performing load lock control.
In the converter 10 and its conversion method, where an absolute pressure sensor for detecting an absolute pressure in a load lock chamber 60 and a differential pressure sensor for detecting the differential pressure between the surrounding atmospheric pressure and pressure in the load lock chamber 60 are combined, a control signal for opening an internal door 62 from the load lock chamber 60 to a vacuum treatment chamber 70, and a control signal for opening an external door 64 between the peripheral atmosphere and the load lock chamber 60 are provided. The converter 10 generates a signal for controlling the transition from a state for evacuating the pressure of the load lock chamber slowly by a pump to a state for evacuating the pressure of the load lock chamber rapidly by the pump at a pressure setting point that is determined in advance.
HOLCOMB GARRY
WENZEL OLE
Jun Tsuruta
Masaya Nishiyama
Higuchi Souji