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Patent Searching and Data


Title:
DIFFERENTIAL PRESSURE DETECTOR
Document Type and Number:
Japanese Patent JPS5467480
Kind Code:
A
Abstract:

PURPOSE: To generate the output signals, which have little dependency upon static pressure and which is proportional to the differential pressure by using a pressure sensitive element for static pressure measurement in addition to a pressure sensitive element for differential pressure detection and by properly selecting the variation in the resistance due to the fluctuations in the static pressure.

CONSTITUTION: A pressure sensitive element 20 for metering the static pressure at a higher pressure side PH is composed of distrosion resistive elements 20a and 20b which are prepared by diffusing an impurity onto a single crystal of semiconductor such as silicone. The pressure sensitive element 20 is attached to a body case 2 such that it is in liquid contact with such a pressure transmitter 6b as is sealed with a diaphragm 5b at the higher pressure side PH and a pressure sensitive element 1. The output of the element 20 is fed to a differential pressure detecting circuit 23 through a cable 22 in a similar manner to that of the element 1. By properly selecting the variations in the resistance in that way, it is possible to generate such output signals as has little dependency upon static pressure ans as is proportional to the differential pressure.


Inventors:
NAKADA SHIGEMI
TANITSU MASAMI
IDEKAWA HIROSHI
Application Number:
JP13356477A
Publication Date:
May 30, 1979
Filing Date:
November 09, 1977
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01L13/02; G01L13/00; (IPC1-7): G01L13/00