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Title:
DIFFERENTIAL PRESSURE AND PRESSURE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2012242351
Kind Code:
A
Abstract:

To provide a differential pressure and pressure measuring device whose withstand pressure is improved.

In a semiconductor pressure measuring device including a mold package having one plane connected to one plane of a semiconductor pressure sensor body, covering the other plane of the semiconductor pressure sensor body with a gap and made of mold material, a differential pressure and pressure measuring device includes: two pressure-resistant cover members of pressure resistance having a recessed part; a pressure-resistant cover formed by weldbonding opening parts of recessed parts to each other, in which the opening parts of the recessed parts of the pressure-resistant cover members are arranged oppositely and the mold package is arranged in the recessed parts with a gap; a signal extraction hole provided in the pressure-resistant cover to communicate with the gap; eight signal terminals concentratedly arranged in the signal extraction hole; and a filling body filled in the gap through the signal extraction hole and made of adhesive having a young's modulus larger than that of mold material of the mold package.


Inventors:
KAWAKATSU KAZUAKI
KAMIMURA TAKASHI
Application Number:
JP2011115776A
Publication Date:
December 10, 2012
Filing Date:
May 24, 2011
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01L13/00
Domestic Patent References:
JP2007218858A2007-08-30
JP2010256187A2010-11-11
JPH04102036A1992-04-03
JP2007218858A2007-08-30
JP2010256187A2010-11-11
JPH04102036A1992-04-03