Title:
DIFFERENTIAL PRESSURE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3129613
Kind Code:
B2
Abstract:
PURPOSE: To diagnose the abnormality of a sensor so as to improve the reliability of a device by providing the sensor possessing sensibility mainly to a static pressure on a semiconductor chip, and comparing its measured signal with a static pressure signal obtained through the measured signal of a pair of sensors.
CONSTITUTION: A sensor 21 with sensitivity to a static pressure is provided on a semiconductor chip 1. All the sensors 4, 5 and 21 are vibration type sensors, and when a measuring diaphragm 3 receives a differential pressure, a compressive stress acts on the sensor 4 and a tensil stress acts on the sensor 5. The sensor 21 is provided on a portion where the effect of the differential pressure is little so that the change of the stress by the differential pressure is little. When the sensors 4, 5 and 21 receive the static pressures, all the sensors 4, 5 and 21 receive the compressive stresses. Detected frequency signals by the sensors 4, 5 and 21 are inputted to a CPU via a multiplexer and a counter so as to compute the differential pressure and the static pressure to determine the abnormality of the sensor. An output value is outputted via a D/A converter and a V/I converter, and is also displayed on a liquid crystal display.
Inventors:
Hideki Kuwayama
Shojiro Toyoda
Eiji Taya
Atsuko Kanehira
Shojiro Toyoda
Eiji Taya
Atsuko Kanehira
Application Number:
JP26944394A
Publication Date:
January 31, 2001
Filing Date:
November 02, 1994
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01L13/06; G01L27/00; (IPC1-7): G01L13/06
Domestic Patent References:
| JP6102116A | ||||
| JP646837A | ||||
| JP5180717A | ||||
| JP264430A | ||||
| JP6137982A | ||||
| JP2136728A | ||||
| JP4212032A | ||||
| JP16837A |