Title:
DIFFERENTIAL PRESSURE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3185956
Kind Code:
B2
Abstract:
PURPOSE: To enable self-diagnosis of the leakage of sealed liquid without removing a differential pressure measuring device from a measuring line by comparing the inclination angle of a specific value curve during self-diagnosis with the inclination angle of initial characteristic curve stored in a memory means.
CONSTITUTION: In normal measurement, if pressure acts from the higher pressure side, the pressure is transmitted to a silicon diaphragm by sealed liquid A and on the contrary, if pressure acts from the lower pressure side, the pressure is transmitted to a silicon diaphragm by sealed liquid B. Therefore, in accordance with the pressure difference between the high pressure side and the low pressure side, the silicon diaphragm is distorted and this distortion is electrically taken out and so the differential pressure is measured. During self-diagnosis, the inclination angle of a specific value curve during self-diagnosis with the inclination angle of initial characteristic curve stored in a memory means 21 are compared. If the former is larger or smaller by a predetermined angle than the latter, the leakage of the sealed liquid A or B in the liquid sealing rooms are judged.
Inventors:
Saichiro Morita
Application Number:
JP14927993A
Publication Date:
July 11, 2001
Filing Date:
June 21, 1993
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01L13/02; G01L9/00; G01L27/00; (IPC1-7): G01L13/02; G01L27/00
Domestic Patent References:
| JP636431A | ||||
| JP54138460A | ||||
| JP1138435A |
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