Title:
DIFFERENTIAL PRESSURE MEASURING SYSTEM
Document Type and Number:
Japanese Patent JP2005049245
Kind Code:
A
Abstract:
To realize the shape of a backplate surface such that a preload diaphragm initiates distortion at a set pressure value.
A differential pressure measuring system comprises a backplate surface provided on the side of a main body and a preload diaphragm attached on the backplate surface and a load is given in advance. The system also comprises a backplate where projections contacting the projections of wave shape of the preload diaphragm are formed and gaps are provided in the concaves of specific locations facing the concaves of the wave shape of the preload diaphragm.
Inventors:
OSHIBA TETSUYA
KUROSAWA AKIRA
AKASHI KEITA
KUROSAWA AKIRA
AKASHI KEITA
Application Number:
JP2003282258A
Publication Date:
February 24, 2005
Filing Date:
July 30, 2003
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01L13/00; G01L13/02; H01L29/84; (IPC1-7): G01L13/00; G01L13/02; H01L29/84
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