To obtain the differential pressure sensor which does not require a power source to detect differential pressure.
The differential pressure sensor is equipped with a pressure sensitive film 7 which has its end part fixed and supported by a fixation part and has a 1st fluid intake space 2a where a 1st fluid 8a flows on the reverse surface side of the pressure sensitive film 7 and a 2nd fluid intake space 2b where a 2nd fluid 8b flows on the top surface side of the pressure sensitive film 7 and detects the differential pressure between the 1st fluid 8a and 2nd fluid 8b from the deformation of the pressure sensitive film 7 while the fluids are put in the fluid intake spaces. The pressure sensitive film 7 is formed of a filmy piezoelectric element 5 which has a reverse-surface side electrode film 4a, a piezoelectric material film 3, and a surface-side electrode film 4b in this order on a thin-film substrate, and the differential pressure between the 1st fluid 8a and 2nd fluid 8b is applied between the top and reverse surfaces of the filmy piezoelectric film 5.
NAKAOKA HARUYUKI
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