Title:
DIFFERENTIAL PRESSURE SENSOR FOR MEASURING MINUTE DIFFERENTIAL PRESSURE
Document Type and Number:
Japanese Patent JP2010133775
Kind Code:
A
Abstract:
To provide a differential pressure sensor which can measure minute differential pressure with high precision.
A pressure-sensitive element 2 of the differential pressure sensor includes a thin film 4 with a thickness of 0.1 to 2.0 mm, a pair of electrodes 5 in contact with the thin film 4, and an outer frame 6 for holding the thin film 4. The thin film 4 is formed of dielectric elastic resin and a plurality of coiled carbon fibers dispersed into the elastic resin of 1 to 20 wt.%. The coiled carbon fiber 8 included in the thin film 4 is formed so that its thickness (fiber diameter) is 1 nm to 10 μm, its coil diameter is 1 nm to 100 μm, and its coil length is 150 μm or shorter.
COPYRIGHT: (C)2010,JPO&INPIT
Inventors:
MOTOJIMA SEIJI
KAWABE KENJI
KAWABE KENJI
Application Number:
JP2008308571A
Publication Date:
June 17, 2010
Filing Date:
December 03, 2008
Export Citation:
Assignee:
UNIV GIFU
CMC GIJUTSU KAIHATSU KK
CMC GIJUTSU KAIHATSU KK
International Classes:
G01L13/06
Attorney, Agent or Firm:
Hiroe Associates Patent Office
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