Title:
DIFFERENTIAL PRESSURE SENSOR MODULE
Document Type and Number:
Japanese Patent JP2017181292
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a differential pressure sensor module that can remove noise voltage from the output voltage of a cantilever type differential pressure sensor, and can accurately output, as output voltage, only the pressure difference between the front side and rear side of a diaphragm mechanism due to a fluid as an original measuring object in a flow channel.SOLUTION: The differential pressure sensor module includes: a bypass channel connected to a flow channel via a pair of openings; a cantilever portion that is installed in the bypass channel, bends and deforms in accordance with the pressure difference between fluids on both sides, and has a generated piezoresistance; resistance detecting means for detecting the resistance change amount of the piezoresistance following the bending and deformation of the cantilever portion and outputting it as voltage to an output terminal; and a low-pass filter disposed on the output terminal side of the resistance detecting means.SELECTED DRAWING: Figure 1
Inventors:
SHIOIRI TATSUYA
Application Number:
JP2016068579A
Publication Date:
October 05, 2017
Filing Date:
March 30, 2016
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
G01L13/02; A61M16/00; G01L13/00
Domestic Patent References:
| JP5867820B2 | 2016-02-24 | |||
| JP5867821B2 | 2016-02-24 | |||
| JP2014173976A | 2014-09-22 |
Attorney, Agent or Firm:
Toru Takahashi
Yutaka Nagasawa
Yutaka Nagasawa
Previous Patent: Distance measuring equipment, a range finding method, and a program
Next Patent: A durability assessment method
Next Patent: A durability assessment method