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Title:
DIFFERENTIAL PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH06186108
Kind Code:
A
Abstract:

PURPOSE: To provide a differential pressure sensor wherein its size is small, its cost is low and its corrosion resistance is enhanced.

CONSTITUTION: This sensor is constituted of a conversion part 3 which converts the output of a differential pressure sensor 4 into an electric signal, of a pressure-receiving block 20 which is fixed to the conversion part 3, which is provided with the differential pressure sensor 4 and which is constituted of a single member, of one pair of pressure-guiding ports 10 formed in one face (or in both faces) of the pressure-guiding ports 10, of a drain-venting hole 26 formed in halfway parts of the pressure-guiding ports 10, of a pressure-receiving diaphragm 2 formed on the respective bottoms of the pressure-guiding ports 10, of a pressure-guiding fine hole 5 formed so as to communicate with the pressure-receiving diaphragm 2 and the differential pressure sensor 4 and of a sealing liquid sealed in the pressure-receiving fine hole 5.


Inventors:
KUWAYAMA HIDEKI
GOTO SHIGERU
OMURA KOJI
Application Number:
JP33873092A
Publication Date:
July 08, 1994
Filing Date:
December 18, 1992
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01L13/00; G01L19/00; (IPC1-7): G01L13/00; G01L19/00
Attorney, Agent or Firm:
Shinsuke Ozawa