PURPOSE: To achieve higher reliability of a clamp part and a lover production cost by employing a more accurate clamping structure without the use of a clamping device especially in a structure for assembling a differential pressure sensor.
CONSTITUTION: A film part 8 containing a strain gauge for detecting pressure is provided on one surface of a diaphragm 6a of a double side pressure receiving type to detect a difference in pressure between pressure media A and B as introduced into the diaphragm to pressurize with the strain gauge. A signal pertaining to the pressure difference is fetched outside a sensor body part 1 with a signal leader line 3 while the signal leader line 3 is fixed on a mounting member 2 piercing it. Moreover, the mounting member 2 is made of material having plastic deformability (metal flow characteristic) while being fixed on the sensor body 1 with an externally swelled part generated utilizing the plastic deformability (metal flow).
ICHIYANAGI TAKESHI
SHOJI AKIRA
AOYAMA SEISAKUSHO