PURPOSE: To easily protect a formed film part for detecting differential pressure and prevent the formed film part from being affected by the expansion due to temperature increase of a protective member so as to enhance high differential pressure detection performance.
CONSTITUTION: A formed film part 2 for detecting differential pressure is formed on at least one face of a diaphragm 1, and a pressure medium is introduced to each of two spaces that are formed on both sides of the diaphragm and then the part 2, bonding wire 9, etc. are covered by a gel substance 10. A container 7 is prepared on the face side where the part 2 of the diaphragm is formed and a terminal board 8 is provided on the container, then the part 2 and board 8 are connected with each other by the bonding wire, etc., and further the substance 10 is poured in the container 7.
ICHIYANAGI TAKESHI
TAMURA MORIO
HIDA NOBUYUKI
HONMA TOSHIO
NAGANO KEIKI SEISAKUSHO KK
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