To provide a high-precision differential pressure sensor which is not influenced by large fluctuations in baseline pressure.
The differential pressure sensor comprises: a pair of diaphragms 1a, 1b including diaphragm parts 7a, 7b which bend under pressure and support parts 8a, 8b for supporting the diaphragm parts through the rim of the diaphragm parts; a pair of disc-shaped fixed electrodes 3a, 3b fixed to the support parts; and a movable electrode 2 which includes a disc-shaped electrode part 9 and axial protrusion parts 10a, 10b extending from the center of the electrode part toward both sides perpendicularly to the electrode part and is fixed to the center of the pair of diaphragms through the axial protrusion parts so that the electrode part faces each of the pair of fixed electrodes with a gap of a predetermined distance. The movable electrode moves so that the distance of the gap changes in accordance with a difference in pressure applied respectively to the diaphragm parts of the pair of diaphragms by an object. Differential pressure is detected on the basis of a change in capacitance caused by a change in the gap.
| JPS58165645U | 1983-11-04 | |||
| JPS58167433U | 1983-11-08 | |||
| JPS5679838U | 1981-06-29 | |||
| JPS5779735U | 1982-05-17 | |||
| JPS56126540U | 1981-09-26 | |||
| JPS593338U | 1984-01-10 |
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita