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Patent Searching and Data


Title:
DIFFERENTIAL PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2013181951
Kind Code:
A
Abstract:

To make peel-off of a junction of a sensor chip hardly occur.

A differential pressure sensor 200 is provided with a sensor chip 3 joined onto a wall surface 1-1a of a partition wall 1-1 positioned on the side of a first space 1-2, so that one face 3-1a of a sensor diaphragm 3-1 faces a first pressure-receiving diaphragm 2-1 and so that a communication passage 3-3 linking to the other face 3-1b of the sensor diaphragm 3-1 communicates with a penetration passage 1-4 of the partition wall 1-1. In the differential pressure sensor 200, the sealing pressure of a first pressure transmitting medium 5-1 sealed in a first sealing chamber 6-1 is made higher than that of a second pressure transmitting medium 5-2 sealed in a second sealing chamber 6-2. Thus, damage due to a back pressure is reduced and peel-off of junctions 4-1, 4-2 is hard to occur.


Inventors:
TAKAI MUNENORI
Application Number:
JP2012047825A
Publication Date:
September 12, 2013
Filing Date:
March 05, 2012
Export Citation:
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Assignee:
AZBIL CORP
International Classes:
G01L13/02
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa