Title:
DIFFERENTIAL PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2984420
Kind Code:
B2
Abstract:
PURPOSE: To provide a hermetic seal mechanism which achieves a high-pressure sealing at a same member as a diaphragm distortion-producing portion and at the same time enable the number of portions to be sealed to be reduced and the manufacture to be eased extremely, and obtain a differential pressure sensor with a highly reliable structure.
CONSTITUTION: In a distortion-producing portion 4a of a diaphragm 4 which is formed by a metal plate, an insulation film is formed on one surface and then a protection film is provided on this insulation film, thus providing a distortion gauge film and a wiring film. Then, a title item is so constituted that a fluid pressure is guided to each surface of front and rear surfaces of the diaphragm 4 and a pressure detection signal which is generated at the wiring film is taken out by a wiring which is lead out through a hermetic seal structure which is formed at a non-distortion-producing portion 4b of the diaphragm 4.
More Like This:
| JPS5486051 | PRESSURE CONVERSION DIAPHGRAM |
| WO/1995/006236 | CAPACITIVE PRESSURE SENSOR |
Inventors:
TAMURA MORIO
ICHANAGI TAKESHI
HIDA NOBUYUKI
TANAKA KYOSHI
SATO FUJIO
SAKAMOTO YUKIO
HASHIMOTO HISANORI
ONOZATO AKIMASA
ICHANAGI TAKESHI
HIDA NOBUYUKI
TANAKA KYOSHI
SATO FUJIO
SAKAMOTO YUKIO
HASHIMOTO HISANORI
ONOZATO AKIMASA
Application Number:
JP16826791A
Publication Date:
November 29, 1999
Filing Date:
July 09, 1991
Export Citation:
Assignee:
HITACHI KENKI KK
International Classes:
G01L7/08; G01L9/00; G01L9/04; G01L13/06; H01L29/84; (IPC1-7): G01L13/06; G01L9/04; H01L29/84
Domestic Patent References:
| JP344079A | ||||
| JP1250732A | ||||
| JP196523A | ||||
| JP62294930A | ||||
| JP3106077A | ||||
| JP363835U |
Attorney, Agent or Firm:
Satoshi Kasuga (1 person outside)