Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DIFFERENTIAL PRESSURE TRANSDUCER
Document Type and Number:
Japanese Patent JPH07190873
Kind Code:
A
Abstract:

PURPOSE: To provide a simple and sturdy pressure sensor capable of giving the vibration of a bridge across diaphragms as a function of a pressure difference.

CONSTITUTION: This differential pressure transducer has the first and the second diaphragms 16 and 18 formed within a block made of such a material as monocrystal silicon. Each of the diaphragms 16 and 18 has bridge support parts 20 and 22, and the bridge support parts 20 and 22 are dislocated from the centers of the diaphragms 16 and 28. Furthermore, a bridge 24 is retained in an evacuated cavity 36, and the resonance frequency of the bridge 24 becomes a function of a difference in pressure acting on the diaphragms 16 and 18.


Inventors:
ARAN JIEEMUZU YAKOBUSUUKUTSUKU
Application Number:
JP27428994A
Publication Date:
July 28, 1995
Filing Date:
October 14, 1994
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
LUCAS IND PLC
International Classes:
G01L9/00; G01L13/00; G02B6/42; (IPC1-7): G01L13/00; G01L9/00; G02B6/42
Attorney, Agent or Firm:
Tadashi Hagino (3 outside)