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Title:
DIFFERENTIAL PRESSURE TRANSMITTER
Document Type and Number:
Japanese Patent JP2013190325
Kind Code:
A
Abstract:

To provide a differential pressure transmitter which achieves further miniaturization of a body by decreasing a diameter of a pressure sensing diaphragm without causing problems such as hydrogen permeation and cracks.

A sensor chip 11 is embedded in a small packaging body 20. The sensor chip 11 has an excessive pressure protection function obtained by making recesses 11-2a, 11-3a of stopper members 11-2, 11-3 face one and the other surfaces of a sensor diaphragm 11-1. Barrier diaphragms (pressure sensing diaphragms) 21a, 21b are provided on a side face of the packaging body 20. All of the sensor chip 11, the barrier diaphragms 21a, 21b, and the packaging body 20 are made of a semiconductor material (e.g. SiN, sapphire, Si, SiC, quartz, and borosilicate glass, etc.).


Inventors:
TOJO HIROSHI
Application Number:
JP2012056754A
Publication Date:
September 26, 2013
Filing Date:
March 14, 2012
Export Citation:
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Assignee:
AZBIL CORP
International Classes:
G01L13/00; G01L19/06; G01L19/14
Domestic Patent References:
JPH0395425A1991-04-19
JP2001242027A2001-09-07
JPS6061637A1985-04-09
JPH08139339A1996-05-31
JPH04301731A1992-10-26
JPS61500633A1986-04-03
JPS55103440A1980-08-07
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa