To provide a differential pressure transmitter which achieves further miniaturization of a body by decreasing a diameter of a pressure sensing diaphragm without causing problems such as hydrogen permeation and cracks.
A sensor chip 11 is embedded in a small packaging body 20. The sensor chip 11 has an excessive pressure protection function obtained by making recesses 11-2a, 11-3a of stopper members 11-2, 11-3 face one and the other surfaces of a sensor diaphragm 11-1. Barrier diaphragms (pressure sensing diaphragms) 21a, 21b are provided on a side face of the packaging body 20. All of the sensor chip 11, the barrier diaphragms 21a, 21b, and the packaging body 20 are made of a semiconductor material (e.g. SiN, sapphire, Si, SiC, quartz, and borosilicate glass, etc.).
JPH0395425A | 1991-04-19 | |||
JP2001242027A | 2001-09-07 | |||
JPS6061637A | 1985-04-09 | |||
JPH08139339A | 1996-05-31 | |||
JPH04301731A | 1992-10-26 | |||
JPS61500633A | 1986-04-03 | |||
JPS55103440A | 1980-08-07 |
Shigeki Yamakawa
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