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Patent Searching and Data


Title:
DIFFERENTIAL PRESSURE TYPE PRESSURE CHANGE MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH06167406
Kind Code:
A
Abstract:

PURPOSE: To accurately measure a fine pressure change regardless of the magnitude of pressure.

CONSTITUTION: A differential pressure type pressure change measuring device is equipped with a differential pressure type pressure sensor 10, the automatic back pressure adjusting mechanism 20 provided in parallel to the pressure sensor 10, the gas pipe 30 for connecting the back pressure area of the pressure sensor 10 to airtightly with the automatic back pressure adjusting mechanism 20, and the opening and closing valve 36 provided to the gas pipe 30. The differential pressure type pressure sensor 10 is airtightly partitioned into upper and lower parts by a diaphragm 12 and the gas pipe 30 is connected to the upper part. The automatic back pressure adjusting mechanism 20 is a cylindrical container 21 having an opening 22 provided to the bottom part thereof and the gas pipe 10 is connected to the upper part of the container 21.


Inventors:
OI YUKIO
Application Number:
JP34123492A
Publication Date:
June 14, 1994
Filing Date:
November 27, 1992
Export Citation:
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Assignee:
OYO CORP
International Classes:
G01L13/02; (IPC1-7): G01L13/02
Attorney, Agent or Firm:
Shigemi