Title:
DIFFERENTIAL PRESSURE TYPE LEAKAGE-QUANTITY REGULATOR
Document Type and Number:
Japanese Patent JPS58166738
Kind Code:
A
Abstract:
PURPOSE:To enable to regulate the quantity of leakage from an air nozzle on the reference air pressure side easily and accurately by changing the superposing area of a fixed air hole and a movable air hole in a digital or analog manner by the movement by operation from the outside of a movable member. CONSTITUTION:When a collet 5 is fitted to the second air nozzle 3, the leakage- quantity regulator 11 is regulated so that the quantity of leakage corresponding to the inner diameter of a new collet 5 is obtained, but the quantity of leakage of the leakage-quantity regulator 11 may also be regulated by stages in conformity with the inner diameters of the collets 5 because the inner diameters differ by stages at every kind. The quantity of leakage is regulated by stages by turning each control ring 13, 14, 15 and selectively stacking the movable air holes 18, 19, 20 onto the fixed air holes 17, 17.... Such regulation may be executed by grasping the inner diameter of a new collet 5 and obtaining the positions of the movable air holes 18, 19, 20 of each control ring 13, 14, 15 from a data table. Regulation can easily be made sure because the positions of the movable air holes 18, 19, 20 are placed under monitoring by eyesight.
Inventors:
TAKEMURA SEIICHI
Application Number:
JP4979282A
Publication Date:
October 01, 1983
Filing Date:
March 26, 1982
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP54167117B | ||||
| JPS55146320A | 1980-11-14 |
Attorney, Agent or Firm:
Shogo Ehara