PURPOSE: To obtain high detection precision by making beam welding easier, so that a differential pressure sensor is miniaturized with the use of it, for reduced initial distortion of a diaphragm caused by welding end clamping torque.
CONSTITUTION: A diaphragm 13 of double-sided pressure reception type and first and second introduction channels 19 and 20 by which the pressure fluid of different pressure A and B is introduced into both sides of the diaphragm 13 are included, and an annular supporting part 24 to which the diaphragm 13 is jointed is farmed so that it is projected steps at the center of outside end part, a sensor attaching part 11b formed at the first and second introduction channels and one open end part are jointed to the periphery of outside end part of the sensor attaching part 11b by welding, and further, a diaphragm 13 housing part 11a wherein a hermetic member 16 for signal input/output line fixing is jointed to the other open end part and a guide line 14 which connects the input/output terminal of differential pressure detection part with a signal input/output line 15 are provided, and, an annular supporting part 24 and the annular part of the diaphragm 13 are joined together by beam welding for their entirety.
ICHIYANAGI TAKESHI
SATO FUJIO
HIDA NOBUYUKI
TANAKA KIYOSHI
NAKAMURA SHIGETAKA
HONMA TOSHIO
NAGANO KEIKI SEISAKUSHO KK
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