Title:
DIFFERENTIAL PRESSURE/PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP3895937
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To adjust sensitivity to be high to the static pressure, and to be low to the differential pressure, and to reduce crosstalks, by installing gages for static pressure detection at the optimum position.
SOLUTION: A diaphragm 3 is formed on the center part of a sensor chip 2, and the gages 6a-6d for detection of the differential pressure or the pressure are installed on the surface peripheral part of the diaphragm 3. The rear surface of a thick wall part 2a of the sensor chip 2 is joined to a pedestal 4. A step part 10 is formed on the pedestal 4, to thereby form the thick wall part 2a of the sensor chip 2 from a joined part 13A joined to the pedestal 4 and a noncontact part 13. The gages for static pressure detection 15a-15d are installed on the sensor chip surface of the unjoined part 13.
Inventors:
Hiroshi Tojo
Masayuki Yoneda
Masayuki Yoneda
Application Number:
JP2001082210A
Publication Date:
March 22, 2007
Filing Date:
March 22, 2001
Export Citation:
Assignee:
YAMATAKE CORPORATION
International Classes:
G01L9/00; G01L9/04; G01L13/06; H01L29/84; (IPC1-7): G01L9/04; G01L13/06; H01L29/84
Domestic Patent References:
| JP61056465A | ||||
| JP8075581A | ||||
| JP6102128A | ||||
| JP8021774A | ||||
| JP9304206A | ||||
| JP2000214022A |
Attorney, Agent or Firm:
Masaki Yamakawa
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