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Title:
加工用液剤の希釈装置
Document Type and Number:
Japanese Patent JP6846910
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dilution device of a processing liquid agent capable of properly managing the processing liquid agent by diluting an undiluted solution in the accurate ratio by accurately measuring the undiluted solution.SOLUTION: A dilution device comprises: a storage tank 10 for storing a processing liquid agent obtained by diluting an undiluted solution with water; a measuring container 20 for measuring the undiluted solution supplied from an undiluted solution supply passage 61; a liquid volume sensor 30 for detecting the liquid volume of the undiluted solution supplied into the measuring container 20; input means 40 for inputting the undiluted solution in the measuring container 20 to the storage tank 10 when the liquid volume sensor 30 detects that the undiluted solution in the measuring container 20 reaches a predetermined liquid volume; and cleaning means 50 for performing cleaning by spraying the processing liquid agent or the water on an inner surface of the measuring container 20 from during to after the input by the input means 40. Even in the undiluted solution high in viscosity on the premise of dilution, the undiluted solution sticking to the inner surface of the measuring container 20 is washed away. The washed-away undiluted solution is inputted to the processing liquid agent obtained by dilution.SELECTED DRAWING: Figure 1

Inventors:
Junichi Tominaga
Application Number:
JP2016215985A
Publication Date:
March 24, 2021
Filing Date:
November 04, 2016
Export Citation:
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Assignee:
Nifco Plant Co., Ltd.
International Classes:
B01F3/08
Domestic Patent References:
JP3239445A
JP2000317285A
JP3016401U
JP2014176942A
JP2016087741A
JP2006014975A
JP3196061U
JP2006035024A
Attorney, Agent or Firm:
Naoyuki Morimoto