Title:
DIMENSION CALIBRATION SPECIMEN
Document Type and Number:
Japanese Patent JP3488745
Kind Code:
B2
Abstract:
PURPOSE: To provide a dimension calibrating specimen for calibration of the dimension or magnification of a scanning electron microscope such as a length measuring SEM, with which the installation can be made simply and a precise calibration can be made.
CONSTITUTION: A calibrating specimen is prepared by mounting a base board 2 having a fine calibration pattern in a holder 1 having a reference surface 3 which is in compliance with the pattern direction. Use of a diffraction grating pattern provided on a (110) Si substrate enables precise calibration, and calibration in the longitudinal and the transverse direction can be done well by providing two perpendicularly intersecting substrates as given above. This calibration specimen allows performing precise calibration simply at any time as needed. Since the diffraction grating of the calibration pattern is uniform within a range of several millimeters, the position of the calibration pattern can be located automatically by specifying the coordinates on a wafer cassette, so that it is also practicable to make automatic calibration using this specimen.
Inventors:
Yoshinori Nakayama
Tokuro Saitoh
Shinji Okazaki
Koji Toyoda
Tokuro Saitoh
Shinji Okazaki
Koji Toyoda
Application Number:
JP16766794A
Publication Date:
January 19, 2004
Filing Date:
July 20, 1994
Export Citation:
Assignee:
独立行政法人産業技術総合研究所
株式会社日立製作所
株式会社日立製作所
International Classes:
H01J37/20; G01B15/00; H01J37/22; (IPC1-7): H01J37/20
Domestic Patent References:
| JP4289411A | ||||
| JP5951447A | ||||
| JP6432107A |
Attorney, Agent or Firm:
Yasuo Sakuta (1 outside)
Yasuo Sakuta (1 outside)
Yasuo Sakuta (1 outside)
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