Title:
DIMENSION MEASURING APPARATUS USING ELECTRON BEAM
Document Type and Number:
Japanese Patent JPS63191012
Kind Code:
A
Abstract:
PURPOSE:To achieve a setting of cursor surely and easily, by displaying the shape of a surface of a sample obtained by a secondary electron beam image together with the sectional shape of the sample obtained by an absorption electron current. CONSTITUTION:The amount of an absorption electron current as obtained when an electron beam is moved being irradiated on a semiconductor substrate 2 as ground of an electrode wire from the point E to the point E' is illustrated in superimposition with changes in the amount of absorption electron current as obtained when an electron beam is moved continuously in a linear path starting from the point D to points C, B, A, A', B', C' and D'. This illustration shows the sectional shape of an electrode film 1 as sample. Thus, a surface shape isometric view by a secondary electron beam image is displayed on the same video display terminal thereby facilitating cursor matching.
Inventors:
HARADA YOSHIKAZU
Application Number:
JP2306587A
Publication Date:
August 08, 1988
Filing Date:
February 02, 1987
Export Citation:
Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
G01B15/00; G01R31/302; H01J37/04; H01J37/22; H01L21/66; (IPC1-7): G01B15/00; H01J37/04; H01J37/22; H01L21/66
Attorney, Agent or Firm:
Toshio Nakao
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