To provide a direction changing device enabling a reduction in carrying time.
This direction changing device comprises: linear first and second carrying routes 3, 4 having the same length, one of which has the same height as a first carrying rail 16, the other of which is disposed at the lower position than the one, disposed perpendicular to each other and the mid point thereof is positioned on a same vertical line, and carrying a FOUP 5; a turn table 2 and a rotating part 22 for simultaneously rotating the first and second carrying routes 3, 4 around the mid point; a lifting part 23 vertically moving the first and second carrying routes 3, 4 and a control part which, when the FOUP 5 is discharged from the first carrying rail 16 to a carrying route at the same height as the first carrying rail 16, rotates the first and second carrying routes 3, 4 approximately by 90°, and after the FOUP 5 is carried out of the carrying route, controls the first and second carrying routes 3, 4 so that their positions in the vertical direction can be changed.
COPYRIGHT: (C)2007,JPO&INPIT
TSUBAKI TATSUO
MURATA MASANAO
| JPH0485210A | 1992-03-18 | |||
| JP2003506289A | 2003-02-18 | |||
| JPS6256213A | 1987-03-11 | |||
| JPH03288706A | 1991-12-18 |
Makoto Suhara