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Patent Searching and Data


Title:
DISC SUPPORT FOR FILMING APPARATUS
Document Type and Number:
Japanese Patent JP3206208
Kind Code:
B2
Abstract:

PURPOSE: To enhance filming speed, film quality, and film thickness distribution by a constitution wherein a retainer retaining the top surface of a disc is not supported by a supporting arm located above the disc.
CONSTITUTION: The disc support comprises a revolving shaft 19 which can elevate and lower freely, a receiving part 12 formed on the periphery at the upper end part of the shaft 19 and receiving the lower face on the periphery of a central hole 13 made through a disc 10, and a retainer 27 provided at the upper end of the shaft 19 such that it can be enlarged or shrunk freely and retains the top surface of the disc 10 mounted on the receiving part 12 at the periphery thereof.


Inventors:
Hajime Hashimoto
Application Number:
JP10756293A
Publication Date:
September 10, 2001
Filing Date:
April 08, 1993
Export Citation:
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Assignee:
Nissin Electric Co., Ltd.
International Classes:
C23C14/50; C23C16/458; H01F41/14; H01L21/205; (IPC1-7): C23C14/50; C23C16/458; H01L21/205
Domestic Patent References:
JP353554U
Attorney, Agent or Firm:
Ryutaro Fujita