Title:
放電プラズマ装置
Document Type and Number:
Japanese Patent JP4618145
Kind Code:
B2
Inventors:
Takashi Hatai
Koichi Aizawa
Tsutomu Hibara
Koichi Aizawa
Tsutomu Hibara
Application Number:
JP2006023592A
Publication Date:
January 26, 2011
Filing Date:
January 31, 2006
Export Citation:
Assignee:
Panasonic Electric Works Co., Ltd.
International Classes:
H01J7/30; H01J61/54
Domestic Patent References:
| JP6215883A | ||||
| JP4342951A | ||||
| JP11329213A | ||||
| JP2242561A | ||||
| JP2000512070A |
Attorney, Agent or Firm:
Keisei Nishikawa