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Title:
DISCHARGE PLASMA TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2003168593
Kind Code:
A
Abstract:

To provide a discharge plasma treatment apparatus which can stably and evenly treat a substance to be treated in continuous (rolled) form.

For the discharge plasma treatment apparatus, in which an electric field is applied between a pair of electrodes, at least one of which is covered with a solid dielectric, a treating gas is introduced between the electrodes, and a substance to be treated placed between the electrodes is treated with glow discharge plasma generated, at least one of the electrodes is an endless belt like electrode equipped with a temperature controlling mechanism.


Inventors:
IWANE KAZUYOSHI
Application Number:
JP2001364589A
Publication Date:
June 13, 2003
Filing Date:
November 29, 2001
Export Citation:
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Assignee:
SEKISUI CHEMICAL CO LTD
International Classes:
H05H1/24; C08J7/00; C23C16/50; (IPC1-7): H05H1/24; C08J7/00; C23C16/50