Title:
多段階位置を有するディスクリート制御マイクロミラー
Document Type and Number:
Japanese Patent JP2008503772
Kind Code:
A
Abstract:
This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Supporter Discretely Controlled Micromirror (VSDCM), which has a larger displacement range than the conventional electrostatic micromirror. The displacement accuracy of the VSDCM is better than that of the conventional electrostatic micromirror and the low driving voltage is compatible with IC components. The second type of DCM, the Segmented Electrode Discretely Controlled Micromirror (SEDCM) has same disadvantages with the conventional electrostatic micromirror. But the SEDCM is compatible with known microelectronics technologies.
Inventors:
Seo Jeong Soo
Gim, Dong Woo
Cho, Kyung Il
Kim Tae Hyun
Gim, Dong Woo
Cho, Kyung Il
Kim Tae Hyun
Application Number:
JP2007516639A
Publication Date:
February 07, 2008
Filing Date:
June 15, 2005
Export Citation:
Assignee:
Stereo display, Incorporated
Angstrom, Inc.
Angstrom, Inc.
International Classes:
G02B26/08; B81B3/00; B81B7/04; G02B5/10; G03H1/16
Foreign References:
| US20030007721A1 | 2003-01-09 | |||
| US20030007237A1 | 2003-01-09 | |||
| US20040070315A1 | 2004-04-15 |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office