To prevent a peeled matter from sticking onto a disk substrate by sucking the peeled matter from a surface of a mask material into a vacuum- sucking device when a disk like recording medium is manufactured.

The disk like recording medium is manufactured by forming a thin film layer on a disk substrate 10 after the disk substrate 10, a part of which are masked by an outer mask 12 and an inner mask 13, is attached to a pallet 11. At this time, this device is a loading/unloading device used for attaching the mask materials 12, 13 and the disk substrate 10 to the pallet 11 and unloading the mask materials 12, 13 and the disk substrate 10 from the pallet 11, and is provided with the vacuum-sucking device provided with sucking electromagnetic valves 36, 35, etc., for the inner mask 13 and the outer mask 12 holding the mask materials 12, 13 by vacuum suction. Since the mask materials 12, 13 are held by vacuum suction with the vacuum sucking device, the peeled matter from the surfaces of the mask materials 12, 13 is sucked into the vacuum-sucking device. Thus, the peeled matter from the surfaces of the mask materials 12, 13 is prevented from sticking to the disk substrate 10.