PURPOSE: To attain smooth loading while preventing a flow onto a disk by correcting the attitude of a disk carrying means so as to lift down the disk thereby bringing the tilt into a prescribed quantity or below based on a tilt detection signal.
CONSTITUTION: A disk 2 is gripped by a finger 3b of a handling robot 3 and carried just above a turntable 1 and lifted down by several mm. Then a switch valve 14a of a delivery/exhaust device 11 is set to the delivery position and compressed air is supplied to ducts 91W94 to close the exhaust system. If the disk 2 it tilted, air is jetted from openings 91eW94e to cause a difference in each back pressure of the disk 2, and it is detected by back pressure sensors 41W42. Then detection signals b1Wb4 are fetched in a microcomputer 5, and the attitude of the handling robot 3 is corrected by a prescribed quantity as to the turning direction shown in arrows and θ. In stopping the delivery, the disk 2 lifted down gradually and landed on a disk face 6a.
HASEGAWA ICHIJI
NAKAI YASUHIDE
MANABE TOMOTAKA
