Title:
円板形ワークの洗浄装置
Document Type and Number:
Japanese Patent JP4295878
Kind Code:
B2
Abstract:
The washing apparatus is based on a process comprising the steps of extracting a plurality of workpieces W to be washed from rows of workpieces arranged longitudinally and at certain intervals in a carrier 10 at intervals of a plurality of workpieces by means of a plurality of lifting arms 21a and 21b; lifting the thus extracted workpieces to respective washing positions at alternately high and low heights; holding the thus lifted workpieces W from both sides thereof by means of rotating pairs of washing rollers 3a and 3b; scrubbing the works in a washing solution 2 by the use of the washing rollers 3a and 3b while forcedly rotating with the driving belt 34 by pressing the works against the driving belt 34 under the action of the rotational force of the washing rollers 3a and 3b; and the workpieces in the carrier 10 are washed by repeating these steps a plurality of times.
Inventors:
Yoshinobu Terui
Hiroshi Sato
Noriaki Mizuno
Hiroshi Sato
Noriaki Mizuno
Application Number:
JP32697399A
Publication Date:
July 15, 2009
Filing Date:
November 17, 1999
Export Citation:
Assignee:
Speed Fam Clean System Co., Ltd.
International Classes:
B08B1/02; B08B1/04; B08B3/04; B08B3/10; G11B23/50; H01L21/00; H01L21/304
Domestic Patent References:
| JP10323632A | ||||
| JP11090359A | ||||
| JP11243075A |
Attorney, Agent or Firm:
Hiroshi Hayashi
Masao Uchiyama
Masahiko Goto
Masao Uchiyama
Masahiko Goto