転位の評価方法および転位の評価を行うためのコンピュータプログラム

Title:

転位の評価方法および転位の評価を行うためのコンピュータプログラム

Document Type and Number:

Japanese Patent JP7228440

Kind Code:

B2

Abstract:

To provide a technique for more accurately determining the type of dislocation in a semiconductor having a low symmetry crystal structure.SOLUTION: An evaluation of dislocation in a semiconductor having a low symmetry crystal structure is performed by determining the type of the actual dislocation in comparison with a contrast evaluation value and a contrast estimated value by acquiring N-pieces of X-ray topography images corresponding to diffraction surfaces of N types (N is an integer of three or more) different from each other, by acquiring the contrast evaluation value of an actual dislocation image for each of N-pieces of the acquired X-ray topography images, and by acquiring the contrast estimated value formed in the X-ray topography image by the type of dislocation which may occur.SELECTED DRAWING: Figure 10

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Inventors:

Yao Yongzhao
Yukari Ishikawa

Application Number:

JP2019062125A

Publication Date:

February 24, 2023

Filing Date:

March 28, 2019

Export Citation:

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Assignee:

Fine Ceramics Center

International Classes:

G01N23/205; G01N23/2055; H01L21/66

Domestic Patent References:

JP2014002104A
JP2015188003A
JP2017193466A
JP2010118487A
JP2003188224A
JP2016150871A

Foreign References:

WO2017078127A1
US20090034681

Attorney, Agent or Firm:

Yoshiyuki Mizuno

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