PURPOSE: To obtain a dispersing device for fine particles to disperse fine particles on a substrate with which the dispersion state is controlled, the utilizing efficiency of fine particles is increased, dispersion defects due to aggregation of fine particles is improved, and the working time and the cost is decreased.
CONSTITUTION: This device is equipped with a cylindrical body 12, funnel nozzle 14 attached to the bottom of the cylindrical body, and a valve means 16 having a body to form a gap disposed to maintain a larger gap 21 between the body and the inner wall of the funnel nozzle 14 than the particle size of fine particles. Fine particles housed in the funnel nozzle 14 are passed through the gap 21 and discharged through the top end of the nozzle 14 while the funnel nozzle 14 and/or the gap forming body are vibrated.
OBARA AKIHIRO
KAMATA KEIJI
