Title:
分散板
Document Type and Number:
Japanese Patent JP5860920
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dispersion plate capable of being subjected to less deformation, improving distribution of gas, improving stability of distribution of gas in an upper electrode device, and improving uniformity of a film thickness of a coating device.SOLUTION: A dispersion plate 1 used for a coating device includes an effective area in which pores 10 for penetration of gas are arranged at equal intervals, and an ineffective area for connection of the dispersion plate 1 and an external device, which is placed around the effective area, corresponds to a position of an ineffective area of a substrate to be coated, and has a plurality of cut lines 15, 16.
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Inventors:
Permission
Kanesho Fa
Kanesho Fa
Application Number:
JP2014090000A
Publication Date:
February 16, 2016
Filing Date:
April 24, 2014
Export Citation:
Assignee:
EVERDISPLAY OPTRONICS (SHANGHAI) LIMITED
International Classes:
C23C16/455; H01L51/50; H05B33/10
Domestic Patent References:
| JP2011137228A | ||||
| JP2005256172A | ||||
| JP2008535203A | ||||
| JP2008141104A | ||||
| JP2002324781A | ||||
| JP2010171244A |
Foreign References:
| US20120174866 | ||||
| WO2009069211A1 |
Attorney, Agent or Firm:
Fukami patent office