Title:
DISPLACEMENT DETECTING DEVICE, MICROSCOPE APPARATUS, REFERENCE POINT DETECTING METHOD, AND PROGRAM
Document Type and Number:
Japanese Patent JP2007278817
Kind Code:
A
Abstract:
To enable a reference position which is formed on a scale, to be found effectively.
The scale 20 moves depending on a positional fluctuation. An encoder head 10 detects the reference point based on a reference position mark 22 formed on the scale 20. A reference position track which includes a plurality of reference position marks 22, is disposed on the scale 20, and a multi-reference position block being composed of the plurality of reference position marks 22 arranged along a direction in which the scale 20 moves, and non-reference position block having no reference position mark 22, are disposed adjacently on the reference position track along the direction in which the scale 20 moves.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
ITO TAKESHI
KAMI YOSHIHIRO
KAMI YOSHIHIRO
Application Number:
JP2006104878A
Publication Date:
October 25, 2007
Filing Date:
April 06, 2006
Export Citation:
Assignee:
OLYMPUS CORP
International Classes:
G01D5/244
Attorney, Agent or Firm:
Yoshiyuki Osuga