Title:
Displacement detecting device
Document Type and Number:
Japanese Patent JP6251126
Kind Code:
B2
Abstract:
To provide a displacement detecting device capable of achieving an improvement in a measurement range without being restricted by an origin mark or an origin signal. A displacement detecting device 1 includes a scale 2, scale marks, a displacement detecting section 9, a displacement calculation section 4, a movement detecting section 10, a movement amount calculation section 5, a comparison/calculation section 6, and an absolute position calculation section 7. The comparison/calculation section 6 differentiates, when the displacement detecting section 9 or scale 2 moves in a track direction Y1, a displacement amount calculated by the displacement calculation section 4, thereby calculating a second-order differential amount in the track direction Y1. The absolute position calculation section 7 calculates an absolute position in a measurement direction X1 with respect to the scale 2, based on the second-order differential amount calculated by the comparison/calculation section 6, and outputs the absolute position.
Inventors:
Motofumi Kataoka
Application Number:
JP2014120210A
Publication Date:
December 20, 2017
Filing Date:
June 11, 2014
Export Citation:
Assignee:
dmg Mori Seiki Co., Ltd.
International Classes:
G01D5/347; G01D5/245
Domestic Patent References:
| JP2009198318A | ||||
| JP2004170153A |
Foreign References:
| EP1043571A1 |
Attorney, Agent or Firm:
Shinto International Patent Office