Title:
DISPLACEMENT GAUGE
Document Type and Number:
Japanese Patent JP3513817
Kind Code:
B2
Abstract:
PURPOSE: To provide a displacement gauge which can measure the displacement on the surface of an object and can display the inclination of the surface for measuring the displacement.
CONSTITUTION: The displacement gauge comprises a light source 1 for projecting a light on an object 6, an image pickup light source 13 for irradiating the object 6 with a light having wavelength longer than that of the light emitted from the light source 1, an objective lens 5 for passing the lights emitted from the light sources 1, 13 and reflected from the object 6, a half mirror 3 receiving the reflected lights passed through the objective lens 5, and an element 10 receiving the light reflected from the half mirror 3 thus picking up the surface image of the object.
Inventors:
Akishiba, Yuuji
Akiyama, Masahiko
Akiyama, Masahiko
Application Number:
JP9241194A
Publication Date:
March 31, 2004
Filing Date:
April 28, 1994
Export Citation:
Assignee:
KEYENCE CORP
International Classes:
G01B11/26; G01C3/06; (IPC1-7): G01C3/06; G01B11/26
Attorney, Agent or Firm:
河野 登夫