Title:
DISPLACEMENT MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JP3817232
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To conduct accurate displacement measurement (height measurement) about a measured object having a low-reflectance area and a high-reflectance area.
SOLUTION: This displacement measuring instrument 10 has a light projection part 12, a regular reflection photo-receiving part 13 for outputting a regular reflection displacement signal A and a regular reflection luminous energy signal B, an irregular reflection photo-receiving part 14 for outputting an irregular reflection displacement signal C and an irregular reflection luminous energy signal D, and a signal processing part 15. In the signal processing part 15, the reflection luminous energy signal B is compared with its threshold value E, the irregular reflection luminous energy signal D is compared with its threshold value F, and either of the regular reflection displacement signal A or the irregular reflection displacement signal C is selected to be output. The accurate displacement measurement (height measurement) about the measured object 5 is conducted noncontactly, since the signal is selected while using properly regular reflection or irregular reflection in response to a reflectance of the measured object 5.
Inventors:
Masaya Sugai
Norihiko Masuda
Takahisa Tashita
Eiji Tsujimura
Norihiko Masuda
Takahisa Tashita
Eiji Tsujimura
Application Number:
JP2003159471A
Publication Date:
September 06, 2006
Filing Date:
June 04, 2003
Export Citation:
Assignee:
Anritsu Co., Ltd.
International Classes:
G01B11/00; G01C3/06; (IPC1-7): G01B11/00; G01C3/06
Domestic Patent References:
| JP4221705A | ||||
| JP1183426A |
Attorney, Agent or Firm:
Norimitsu Nishimura
Noriyuki Suzuki
Noriyuki Suzuki