DISPLACEMENT MEASURING INSTRUMENT

Japanese Patent JP3951914

B2

PROBLEM TO BE SOLVED: To provide a displacement measuring instrument for sharply reducing assembly/adjustment manpower since a lighting system for irradiating a measuring object and an imaging optical system for measuring reflected light from the measuring object are downsized/integrated, performing clear guide mark projection on the measuring object, and performing irradiation with brightness enough for measurement.
SOLUTION: This displacement measuring instrument for optically measuring displacement of the measuring object, is characterized at least in that the lighting system and the imaging optical system are mounted on a common base. The lighting system includes a light guide for transmitting output light of a light source and a condensing lens for condensing the output light of the light guide to irradiate the measuring object. The optical system forms an image of reflected light of the measuring object on the surface of a light receiving sensor.

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Hiroyuki Yamamoto
Fumio Watanabe
Kazutoshi Okamoto

JP2002373588A

August 01, 2007

December 25, 2002

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Yokogawa Electric Corporation

G01B11/00; (IPC1-7): G01B11/00

JP5126748A
JP8068759A
JP2000141072A
JP63215906A
JP62261908A
JP2036359A
JP2001004325A
JP8068942A

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